IEEE Robert Bosch Micro and Nano Electro Mechanical Systems Award

Casimir force in micro and nano electro mechanical systems

The last 10 years have seen the emergence of microand nanomechanical force sensors capable of measuring the Casimir interaction with great accuracy and precision. These measurements have proved fundamental to further develop the understanding of vacuum fluctuations in the presence of boundary conditions. These micromechanical sensors have also allowed to quantify the influence of materials prop...

Nano-opto-electro-mechanical systems.

A new class of hybrid systems that couple optical, electrical and mechanical degrees of freedom in nanoscale devices is under development in laboratories worldwide. These nano-opto-electro-mechanical systems (NOEMS) offer unprecedented opportunities to control the flow of light in nanophotonic structures, at high speed and low power consumption. Drawing on conceptual and technological advances ...

Micro - Electro - Mechanical - Systems ( Mems )

Fractional Order Control of Micro Electro-Mechanical Systems

This paper addresses the problem of the fractional sliding mode control (FSMC) for a MEMS optical switch. The proposed scheme utilizes a fractional sliding surface to describe dynamic behavior of the system in the sliding mode stage. After a comparison with the classical integer-order counterpart, it is seen that the control system with the proposed sliding surface displays better transient per...

Fractional Order Control of Micro Electro-Mechanical Systems

This paper addresses the problem of the fractional sliding mode control (FSMC) for a MEMS optical switch. The proposed scheme utilizes a fractional sliding surface to describe dynamic behavior of the system in the sliding mode stage. After a comparison with the classical integer-order counterpart, it is seen that the control system with the proposed sliding surface displays better transient per...